Improving the dielectric properties of an electrowetting-on-dielectric microfluidic device with a low-pressure chemical vapor deposited Si3N4 dielectric layer
نویسندگان
چکیده
منابع مشابه
Droplet Velocity in an Electrowetting on Dielectric Digital Microfluidic Device
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ژورنال
عنوان ژورنال: Biomicrofluidics
سال: 2015
ISSN: 1932-1058
DOI: 10.1063/1.4915613